Molecular Rulers for Scaling Down Nanostructures

TLDR

Organic molecules act as rulers to scale down larger parent structures. The study presents a method to build sub‑30‑nm structures with precise spacings using organic molecules and metal ions as size‑controlled resists on predefined patterns. The method involves sequentially applying organic molecules and metal ions as size‑controlled resists, depositing metal, lifting off the multilayer to leave isolated smaller structures, and imaging the resulting thin parallel wires (15–70 nm wide, 1 µm long) with SEM. The technique successfully scales down diverse nanostructures, including hollow patterns.

Abstract

A method of constructing <30-nanometer structures in close proximity with precise spacings is presented that uses the step-by-step application of organic molecules and metal ions as size-controlled resists on predetermined patterns, such as those formed by electron-beam lithography. The organic molecules serve as a ruler for scaling down a larger “parent” structure. After metal deposition and lift-off of the organic multilayer resist, an isolated smaller structure remains on the surface. This approach is used to form thin parallel wires (15 to 70 nanometers in width and 1 micrometer long) of controlled thickness and spacing. The structures obtained were imaged with field emission scanning electron microscopy. A variety of nanostructures could be scaled down, including structures with hollow patterns.