Concepedia

Lift-off Patterning

Lift-Off Patterning is a thin-film patterning technique in microfabrication processes wherein a sacrificial resist layer is selectively removed to detach unwanted deposited material from the substrate, thereby delineating patterned features by剥离 (lifting off) the film regions corresponding to the masked areas during resist development.

115

Publications

10.1K

Citations

470

Authors

143

Institutions

Publications per year

2017–2026

13

Variants

Lift-off Lithography

Parents

Publications

115

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

, , +15

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.3K citations

, , +14

Extreme selectivity in the lift-off of epitaxial GaAs films

Eli Yablonovitch, T.J. Gmitter, J. P. Harbison et al. · Applied Physics Letters · 1987 · 806 citations · Full text

, , +17

Direct and Reliable Patterning of Plasmonic Nanostructures with Sub-10-nm Gaps

Huigao Duan, Hailong Hu, Karthik Kumar et al. · ACS Nano · 2011 · 256 citations

, , +17

Micropatterning of Organic Electronic Devices by Cold-Welding

Changsoon Kim, P. E. Burrows, Stephen R. Forrest · Science · 2000 · 239 citations

, , +17

1–5 of 115

Authors

470

  1. YM
    Yoshiaki Mokuno

    National Institute of Advanced Industrial Science and Technology, Japan

    4 publications · 285 citations

    4

    h-index

  2. AC
    Akiyoshi Chayahara

    National Institute of Advanced Industrial Science and Technology, Japan

    4 publications · 285 citations

    4

    h-index

  3. HY
    Hideaki Yamada

    National Institute of Advanced Industrial Science and Technology, Japan

    4 publications · 285 citations

    4

    h-index

  4. SC
    Sarawut Cheunkar

    California NanoSystems Institute, United States

    3 publications · 214 citations

    3

    h-index

  5. TM
    Takashi Minemoto

    Ritsumeikan University, Japan

    3 publications · 57 citations

    3

    h-index

1–5 of 470

Institutions

143

  1. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    7 h-index

    25 publications

    1.4K citations

  2. University of California, Los Angeles

    Los Angeles, United States

    4 h-index

    23 publications

    1.4K citations

  3. Ritsumeikan University

    Kyoto, Japan

    3 h-index

    14 publications

    268 citations

  4. California NanoSystems Institute

    Los Angeles, United States

    3 h-index

    20 publications

    1.3K citations

  5. Chinese Academy of Sciences

    Beijing, China

    3 h-index

    11 publications

    147 citations

  6. University of California, Berkeley

    Berkeley, United States

    3 h-index

    13 publications

    579 citations

  7. Seoul National University

    Seoul, South Korea

    2 h-index

    14 publications

    906 citations

  8. National Tsing Hua University

    Hsinchu, Taiwan

    2 h-index

    5 publications

    342 citations

1–8 of 143

Venues

  1. Applied Physics Letters

    8 publications · 3.9K citations

    8

    h-index

  2. 8

    h-index

  3. Microelectronic Engineering

    7 publications · 227 citations

    7

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 7 publications · 292 citations

    7

    h-index

  5. Nanotechnology

    7 publications · 382 citations

    7

    h-index

1–5