Extreme selectivity in the lift-off of epitaxial GaAs films

Abstract

We have discovered conditions for the selective lift-off of large area epitaxial AlxGa1−xAs films from the substrate wafers on which they were grown. A 500-Å-thick AlAs release layer is selectivity etched away, leaving behind a high-quality epilayer and a reusable GaAs substrate. We have measured a selectivity of ≳107 between the release layer and Al0.4Ga0.6As. This process relies upon the creation of a favorable geometry for the outdiffusion of dissolved H2 gas from the etching zone.