Concepedia

Mumit Khan

MK

9

Publications

161

Citations

9

H-Index

1994

Active since

Affiliations

University of Wisconsin–Madison(Current)

Motorola (United States)

IBM (United States)

Mumit Khan is an author at University of Wisconsin–Madison specializing in engineering, applied physics, and microscopy.

Top concepts

EngineeringApplied PhysicsMicroscopyMaterial ScienceMicrofabricationPhysicsX-ray ImagingOptoelectronicsMicroelectronicsIntegrated Circuits

Publications per year

1994–2007

9

Publications

9

Comprehensive model of electron energy deposition

Geng Han, Mumit Khan, Yanghua Fang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 27 citations

Electrical Engineering, Engineering, Physics +14

Extreme ultraviolet holographic lithography: Initial results

Yangchun Cheng, Artak Isoyan, John Wallace et al. · Applied Physics Letters · 2007 · 26 citations · Full text

Holography, Optical Materials, Engineering +18

Can proximity x-ray lithography print 35 nm features? Yes

Mumit Khan, Geng Han, Gene Tsvid et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 20 citations

Engineering, Electron-beam Lithography, Microscopy +17

X-ray lithography for ⩽100 nm ground rules in complex patterns

Scott D. Hector, Victor Pol, Azalia A. Krasnoperova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 19 citations

Engineering, Electron-beam Lithography, Microscopy +16

Extension of x-ray lithography to 50 nm with a harder spectrum

Mumit Khan, Geng Han, Srinivas B. Bollepalli et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 18 citations

Optical Materials, Engineering, Electron-beam Lithography +20

Rows per page

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