Statistics
Publications
10
Citations
154
H-Index
10
Active since
1996
Srinivas B. Bollepalli is an author at University of Wisconsin–Madison specializing in engineering, mask fabrication, and mask design.
Publications per year
1996–2008
10
10
Extension of x-ray lithography to 50 nm with a harder spectrum
Mumit Khan, Geng Han, Srinivas B. Bollepalli et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 18 citations
Engineering, Manufacturing Engineering, Materials Science +10
Image formation in extreme ultraviolet lithography and numerical aperture effects
Srinivas B. Bollepalli, Muhammad Burhan Khan, F. Cerrina · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 17 citations
Natural Sciences, Manufacturing Engineering, Microfabrication +16
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