13
Publications
338
Citations
11
H-Index
2003
Active since
Affiliations
Yangchun Cheng is an author at North China Electric Power University specializing in engineering, electrical insulation, and electrical engineering.
Top concepts
EngineeringElectrical InsulationElectrical EngineeringApplied PhysicsInstrumentationOptical MaterialsOptical PropertiesPhysicsEducationPhotonics
Publications per year
2003–2020
13
13
Talbot lithography: Self-imaging of complex structures
Artak Isoyan, Fan Jiang, Yangchun Cheng et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 109 citations
Mask Patterning, Short Wavelength Optic, Optical Materials +26
Extreme ultraviolet holographic lithography: Initial results
Yangchun Cheng, Artak Isoyan, John Wallace et al. · Applied Physics Letters · 2007 · 26 citations · Full text
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