Concepedia

Artak Isoyan

AI

9

Publications

267

Citations

9

H-Index

2002

Active since

Affiliations

University of Wisconsin–Madison(Current)

Colorado State University

Brookhaven National Laboratory

Synopsys (United States)

Artak Isoyan is an author at University of Wisconsin–Madison specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationOptical PropertiesPhysicsMicroscopyPhotonicsOptoelectronics3D PrintingNanophotonics

Publications per year

2002–2012

9

Publications

9

Talbot lithography: Self-imaging of complex structures

Artak Isoyan, Fan Jiang, Yangchun Cheng et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 109 citations

Mask Patterning, Short Wavelength Optic, Optical Materials +26

Defect-tolerant extreme ultraviolet nanoscale printing

Artak Isoyan, Aaron Stein, J. J. Rocca et al. · Optics Letters · 2012 · 37 citations

Engineering, Electron-beam Lithography, Microscopy +17

Extreme ultraviolet holographic lithography: Initial results

Yangchun Cheng, Artak Isoyan, John Wallace et al. · Applied Physics Letters · 2007 · 26 citations · Full text

Holography, Optical Materials, Engineering +18

4X reduction extreme ultraviolet interferometric lithography

Artak Isoyan, Andrea Wüest, John Wallace et al. · Optics Express · 2008 · 24 citations · Full text

Photonics, Engineering, Electron-beam Lithography +11

A novel EUV exposure station for nanotechnology studies

John Wallace, Yangchun Cheng, Artak Isoyan et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2007 · 21 citations

Chemical Engineering, Engineering, Nanomaterials +4

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