Concepedia

Stephanie Winkelmeier

SW

2

Publications

142

Citations

2

H-Index

2001

Active since

Affiliations

IMEC(Current)

Stephanie Winkelmeier is an author at IMEC specializing in engineering, electrical engineering, and electronic engineering.

Top concepts

Publications per year

2001–2003

2

Publications

2

Line edge roughness: characterization, modeling and impact on device behavior

J.A. Croon, Gert Storms, Stephanie Winkelmeier et al. · 2003 · 107 citations

, , +9

Metrology method for the correlation of line edge roughness for different resists before and after etch

Stephanie Winkelmeier, Marko Sarstedt, M. Ereken et al. · Microelectronic Engineering · 2001 · 35 citations

, , +4

Rows per page

1–2 of 2