Concepedia
1
Publications
35
Citations
H-Index
2001
Active since
Affiliations
IMEC(Current)
M. Ereken is an author at IMEC specializing in measurement, civil engineering, and engineering.
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EngineeringMeasurementCivil Engineering
Publications per year
2001–2001
Metrology method for the correlation of line edge roughness for different resists before and after etch
Stephanie Winkelmeier, Marko Sarstedt, M. Ereken et al. · Microelectronic Engineering · 2001 · 35 citations
Different Resists, Engineering, Measurement +4
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