Layout options for stability tuning of SRAM cells in multi-gate-FET technologies

Florian Bauer, K. von Arnim, C. Pacha, T. Schulz, M. Fulde, A. Nackaerts, M. Jurczak, Wenjing Xiong, K.T. San, C. Rinn Cleavelin,

2007 · 15 citations · 8 references

Concepts

Abstract

We present an investigation of different layout options for multi-gate-FET (MuGFET) SRAM cell design. Measurement results for four different core cell layouts are shown. Two different gate stacks using single mid-gap metal gates and HfSiON/SiON gate oxides were investigated. Static noise margins (SNM) of 210 mV have been measured at IV VDD. Trade-offs for MuGFET SRAM cell design are explored. The impact on cell area and scalability is examined.

References

8