Concepedia

Metal Gates

Metal Gates is a transistor gate electrode structure in complementary metal-oxide-semiconductor technology that employs a metal material, distinguished from traditional polysilicon gates by its enhanced electrical conductivity and reduced gate depletion effects, enabling improved device performance and scalability in advanced semiconductor devices.

707

Publications

27.8K

Citations

4.1K

Authors

442

Institutions

Publications per year

2017–2026

88

Parents

Publications

707

A 45nm Logic Technology with High-k+Metal Gate Transistors, Strained Silicon, 9 Cu Interconnect Layers, 193nm Dry Patterning, and 100% Pb-free Packaging

K. Mistry, R. Chau, Changhwan Choi et al. · 2007 · 829 citations

, , +17

High-K materials and metal gates for CMOS applications

John Robertson, Robert M. Wallace · Materials Science and Engineering R Reports · 2014 · 766 citations · Full text

, , +16

Quantized current in a quantum-dot turnstile using oscillating tunnel barriers

Leo P. Kouwenhoven, A. T. Charlie Johnson, N. C. van der Vaart et al. · Physical Review Letters · 1991 · 529 citations

, , +17

High-<tex>$kappa$</tex>/Metal–Gate Stack and Its MOSFET Characteristics

R. Chau, Suman Datta, M. Doczy et al. · IEEE Electron Device Letters · 2004 · 468 citations

, , +17

Metal-dielectric band alignment and its implications for metal gate complementary metal-oxide-semiconductor technology

Yee‐Chia Yeo, Tsu-Jae King, Chenming Hu · Journal of Applied Physics · 2002 · 424 citations

, , +17

1–5 of 707

Authors

4.1K

  1. VN
    Vijay Narayanan

    IBM (United States), United States

    25 publications · 1.1K citations

    16

    h-index

  2. TS
    T. Schram

    IMEC, Belgium

    26 publications · 930 citations

    15

    h-index

  3. GG
    G. Groeseneken

    IMEC, Belgium

    16 publications · 595 citations

    15

    h-index

  4. DK
    Dim‐Lee Kwong

    Institute of Microelectronics, Singapore

    18 publications · 672 citations

    15

    h-index

  5. PM
    P. Majhi

    Intel (United States), United States

    16 publications · 557 citations

    14

    h-index

1–5 of 4.1K

Institutions

442

  1. IMEC

    Leuven, Belgium

    27 h-index

    812 publications

    27K citations

  2. IBM (United States)

    Armonk, United States

    25 h-index

    563 publications

    20.9K citations

  3. Intel (United States)

    Santa Clara, United States

    22 h-index

    221 publications

    67K citations

  4. KU Leuven

    Leuven, Belgium

    21 h-index

    128 publications

    3.5K citations

  5. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    20 h-index

    162 publications

    9.7K citations

  6. National University of Singapore

    Singapore, Singapore

    20 h-index

    154 publications

    4.8K citations

  7. Commissariat à l'Énergie Atomique et aux Énergies Alternatives

    Paris, France

    19 h-index

    324 publications

    10.8K citations

  8. Institute of Microelectronics

    Singapore, Singapore

    18 h-index

    79 publications

    2.2K citations

1–8 of 442

Venues

  1. IEEE Electron Device Letters

    90 publications · 3.9K citations

    34

    h-index

  2. IEEE Transactions on Electron Devices

    78 publications · 2.9K citations

    29

    h-index

  3. Applied Physics Letters

    48 publications · 1.8K citations

    27

    h-index

  4. Microelectronic Engineering

    32 publications · 969 citations

    18

    h-index

  5. Journal of Applied Physics

    19 publications · 1.1K citations

    14

    h-index

1–5