E. P. Gusev

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Publications

Citations

5.9K

H-Index

Active since

1994

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

Rutgers, The State University of New Jersey

Vanderbilt University

Sandia National Laboratories

E. P. Gusev is an author at IBM Research - Thomas J. Watson Research Center specializing in materials science, semiconductor devices, and engineering.

Publications per year

1994–2009

Publications

Ultrathin (&lt;4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits

M. L. Green, E. P. Gusev, R. Degraeve et al. · Journal of Applied Physics · 2001 · 772 citations

Engineering, Materials Engineering, Materials Science +17

High-resolution depth profiling in ultrathin Al2O3 films on Si

E. P. Gusev, M. Copel, E. Cartier et al. · Applied Physics Letters · 2000 · 412 citations

Engineering, Materials Engineering, Materials Science +17

Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues

E. P. Gusev, E. Cartier, D. A. Buchanan et al. · Microelectronic Engineering · 2001 · 386 citations

Natural Sciences, Materials Engineering, Materials Science +12

Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications

E. P. Gusev, C. Cabral, M. Copel et al. · Microelectronic Engineering · 2003 · 309 citations

Engineering, Materials Engineering, Materials Science +15

Advanced high-κ dielectric stacks with polySi and metal gates: Recent progress and current challenges

E. P. Gusev, Vijay Narayanan, Martin M. Frank · IBM Journal of Research and Development · 2006 · 272 citations

Engineering, Electrical Engineering, Materials Science +17

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