Concepedia

Publication | Closed Access

Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues

DOI

385

Citations

30

References

2001

Year

E. P. Gusev, E. Cartier, D. A. Buchanan, M. Gribelyuk, M. Copel, H. Schmidt, C. D’Emic
Microelectronic Engineering

References

YearCitations

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