Concepedia

M. L. Green

ML

1

Publications

767

Citations

1

H-Index

2001

Active since

Affiliations

Rutgers, The State University of New Jersey(Current)

M. L. Green is an author at Rutgers, The State University of New Jersey specializing in optoelectronic devices, engineering, and integrated circuits.

Top concepts

EngineeringSemiconductorsApplied PhysicsMaterial ScienceMicroelectronicsIntegrated CircuitsOxide SemiconductorsElectrical EngineeringOptoelectronic Devices

Publications per year

2001–2001

1

Publications

1

Ultrathin (&lt;4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits

M. L. Green, E. P. Gusev, R. Degraeve et al. · Journal of Applied Physics · 2001 · 767 citations

Engineering, Optoelectronic Devices, Integrated Circuits +18

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