M. Gribelyuk

Structure and stability of ultrathin zirconium oxide layers on Si(001)

M. Copel, M. Gribelyuk, Evgeni Gusev · Applied Physics Letters · 2000 · 667 citations

Natural Sciences, Materials Engineering, Materials Science +17

High-resolution depth profiling in ultrathin Al2O3 films on Si

E. P. Gusev, M. Copel, E. Cartier et al. · Applied Physics Letters · 2000 · 412 citations

Engineering, Materials Engineering, Materials Science +17

Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues

E. P. Gusev, E. Cartier, D. A. Buchanan et al. · Microelectronic Engineering · 2001 · 386 citations

Natural Sciences, Materials Engineering, Materials Science +12

Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications

E. P. Gusev, C. Cabral, M. Copel et al. · Microelectronic Engineering · 2003 · 309 citations

Engineering, Materials Engineering, Materials Science +15

Physical and electrical characterization of Hafnium oxide and Hafnium silicate sputtered films

Agnese Callegari, E. Cartier, M. Gribelyuk et al. · Journal of Applied Physics · 2001 · 265 citations

Natural Sciences, Materials Engineering, Materials Science +17