IBM Journal of Research and Development · 2002 · 192 citations · 12 references
EngineeringComputer EngineeringElectrical EngineeringLow-power DesignMicroelectronicsSemiconductor DevicesCmos Circuit DesignEmbedded Memory BlocksHigh-frequency Semiconductor DevicesIntegrated Circuit DesignMemory Subsystem DesignCmos ScalingHigh PerformanceSilicon-on-insulator TechnologySystem-on-chip ArchitectureSystem-on-chip Integration
SOI CMOS delivers 20–35 % performance gains over bulk CMOS, has powered high‑performance microprocessors since 1998, and is expanding to lower‑end processors, SRAMs, and system‑on‑chip designs as technology scales to 0.13‑µm and beyond. The paper explains why SOI improves performance and its scalability to the 0.1‑µm generation and beyond, after reviewing IBM’s SOI history. Recent SOI applications include high‑end microprocessors, low‑power RF CMOS, embedded DRAM, and vertical SiGe bipolar devices integrated on SOI.
Silicon-on-insulator (SOI) CMOS offers a 20–35% performance gain over bulk CMOS. High-performance microprocessors using SOI CMOS have been commercially available since 1998. As the technology moves to the 0.13-µm generation, SOI is being used by more companies, and its application is spreading to lower-end microprocessors and SRAMs. In this paper, after giving a short history of SOI in IBM, we describe the reasons for performance improvement with SOI, and its scalability to the 0.1-µm generation and beyond. Some of the recent applications of SOI in high-end microprocessors and its upcoming uses in low-power, radio-frequency (rf) CMOS, embedded DRAM (EDRAM), and the integration of vertical SiGe bipolar devices on SOI are described. As we move to the 0.1-µm generation and beyond, SOI is expected to be the technology of choice for system-on-a-chip applications which require high-performance CMOS, low-power, embedded memory, and bipolar devices.
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Physical design of a fourth-generation POWER GHz microprocessor
C.J. Anderson, John G. Petrovick, J. Keaty et al. · 2002 · 117 citations
Engineering, Computer Engineering, Electrical Engineering +14
Partially-depleted SOI technology for digital logic
G. Shahidi, A. Ajmera, F. Assaderaghi et al. · 2003 · 71 citations
Engineering, Computer Engineering, Electrical Engineering +12
A 0.13-μm SOI CMOS technology for low-power digital and RF applications
N. Zamdmer, A. Ray, Jean‐Olivier Plouchart et al. · 2002 · 40 citations
Engineering, Computer Engineering, Electrical Engineering +17