P. Packan

A 14nm logic technology featuring 2<sup>nd</sup>-generation FinFET, air-gapped interconnects, self-aligned double patterning and a 0.0588 µm<sup>2</sup> SRAM cell size

S. Natarajan, M. Agostinelli, Sheikh A. Akbar et al. · 2014 · 521 citations

-Generation Finfet, Rectangular Fins, Engineering +16

Pushing the Limits

P. Packan · Science · 1999 · 383 citations

Engineering, Social Change, Transistor Performance +19

High performance 32nm logic technology featuring 2<sup>nd</sup> generation high-k + metal gate transistors

P. Packan, Sheikh A. Akbar, M Armstrong et al. · 2009 · 184 citations

Nm Logic Technology, Electrical Engineering, Engineering +13

A 32nm logic technology featuring 2<sup>nd</sup>-generation high-k + metal-gate transistors, enhanced channel strain and 0.171μm<sup>2</sup> SRAM cell size in a 291Mb array

S. Natarajan, M Armstrong, M. Bost et al. · 2008 · 184 citations

Engineering, Vlsi Design, Channel Strain +17

Scaling challenges and device design requirements for high performance sub-50 nm gate length planar CMOS transistors

T. Ghani, K. Mistry, P. Packan et al. · 2002 · 165 citations

Electrical Engineering, Physical Design (Electronics), Engineering +11