Partially-depleted SOI technology for digital logic

G. Shahidi, A. Ajmera, F. Assaderaghi, R. Bolam, E. Leobandung, W. Rausch, D. Sankus, D. Schepis, L. Wagner, Kun Wu,

2003 · 71 citations · 0 references

Concepts

Abstract

This partially-depleted (PD) silicon on insulator (SOI) technology results in 20-35% performance gain over a comparable bulk technology. A number of SOI-unique effects that complicate device and circuit design are discussed, along with possible remedies. A fully functional 32 bit microprocessor, operating at >500 MHz, demonstrates this SOI technology.