22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL

P. Chang, C. Ortolland, David Fried, +51

High-performance Soi TechnologyEngineeringVlsi DesignComputer ArchitectureInterconnect (Integrated Circuits) +14

Partially-depleted SOI technology for digital logic

G. Shahidi, A. Ajmera, F. Assaderaghi, +8

Hardware SecurityElectrical EngineeringSoi TechnologyEngineeringVlsi Design +12

High performance 65 nm SOI technology with enhanced transistor strain and advanced-low-K BEOL

W.-H. Lee, Anya M. Waite, H. Nii, +53

EngineeringVlsi DesignIntegrated CircuitsSilicon On InsulatorHigh Performance 65 +17

A 0.25 μm CMOS SOI technology and its application to 4 Mb SRAM

D. Schepis, F. Assaderaghi, D. S. Yee, +24

Low-power ElectronicsElectrical EngineeringEngineeringVlsi DesignVlsi Architecture +8

A 7.9/5.5 psec room/low temperature SOI CMOS

F. Assaderaghi, W. Rausch, A. Ajmera, +8

Low-power ElectronicsRoom TemperatureElectrical EngineeringEngineeringVlsi Design +9

Mainstreaming of the SOI technology

G. Shahidi, Hellen Lo, M. Maloney, +18

EngineeringVlsi DesignComputer ArchitectureTechnology AssessmentSilicon On Insulator +24

Ring Oscillator Based Test Structure for NBTI Analysis

M. B. Ketchen, Manjul Bhushan, R. Bolam

Device ModelingAdjustable Dc PotentialElectrical EngineeringDifferential PairsEngineering +13

New breakdown data generation and analytics methodology to address BEOL and mol dielectric TDDB process development and technology qualification challenges

Fen Chen, Carole Graas, M. Shinosky, +8

EngineeringEducationCareful Data DeconvolutionProcess SafetyReliability Engineering +18

Ti and NiPt/Ti liner silicide contacts for advanced technologies

Praneet Adusumilli, Emre Alptekin, M. Raymond, +68

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringNanoelectronics +13

Scalability of SOI technology into 0.13 μm 1.2 V CMOS generation

E. Leobandung, M. Sherony, J.W. Sleight, +8

Low-power ElectronicsElectrical EngineeringSoi TechnologyEngineeringVlsi Design +10