D. S. Yee

Modification of niobium film stress by low-energy ion bombardment during deposition

J. J. Cuomo, J. M. E. Harper, C. R. Guarnieri et al. · Journal of Vacuum Science and Technology · 1982 · 160 citations

Niobium Film Stress, Engineering, Vacuum Device +17

Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization

L. Krusin‐Elbaum, M. Wittmer, D. S. Yee · Applied Physics Letters · 1987 · 154 citations

Engineering, Solid-state Chemistry, Thin Film Process Technology +21

Incommensurate structure in the Bi-Sr-Ca-Cu-O 80-K superconductor

T. M. Shaw, S. A. Shivashankar, S. J. La Placa et al. · Physical review. B, Condensed matter · 1988 · 124 citations

Materials Science, Superconducting Material, Transition Metal Chalcogenides +12

Control of microstructure and properties of copper films using ion-assisted deposition

R. Roy, J. J. Cuomo, D. S. Yee · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 101 citations

Engineering, Argon Ion Bombardment, Thin Film Process Technology +16

Processing of La1.8Sr0.2CuO4 and YBa2Cu3O7 superconducting thin films by dual-ion-beam sputtering

Peter Madakson, J. J. Cuomo, D. S. Yee et al. · Journal of Applied Physics · 1988 · 71 citations

Materials Science, Superconducting Material, High Quality La1.8sr0.2cuo4 +15