Concepedia

M. Wittmer

MW

Statistics

Publications

58

Citations

3.9K

H-Index

35

Active since

1975

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

ABB (Switzerland)

California Institute of Technology

École Polytechnique Fédérale de Lausanne

M. Wittmer is an author at IBM Research - Thomas J. Watson Research Center specializing in materials science, materials engineering, and semiconductor materials.

Publications per year

1975–1993

58

Publications

58

Oxidation kinetics of TiN thin films

M. Wittmer, J. R. Noser, H. Melchior · Journal of Applied Physics · 1981 · 286 citations

, , +17

Properties and microelectronic applications of thin films of refractory metal nitrides

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 285 citations

, , +17

Barrier layers: Principles and applications in microelectronics

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 202 citations

, , +17

The use of titanium-based contact barrier layers in silicon technology

C. Y. Ting, M. Wittmer · Thin Solid Films · 1982 · 170 citations

, , +13

Applications of TiN thin films in silicon device technology

M. Wittmer, H. Melchior · Thin Solid Films · 1982 · 156 citations

, , +14

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