Applications of TiN thin films in silicon device technology

Physics of Semiconductor Devices

Geoffrey Pridham · Electronics and Power · 1970 · 4K citations

Engineering, Electrical Engineering, Physics +12

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +12

Photoelectric Work Functions of Transition, Rare-Earth, and Noble Metals

D. E. East̀man · Physical review. B, Solid state · 1970 · 727 citations

Natural Sciences, Materials Science, Physics +12

Refractory silicides for integrated circuits

S. P. Murarka · Journal of Vacuum Science and Technology · 1980 · 601 citations

Engineering, Electrical Engineering, Materials Science +17

Oxidation kinetics of TiN thin films

M. Wittmer, J. R. Noser, H. Melchior · Journal of Applied Physics · 1981 · 286 citations

Natural Sciences, Materials Engineering, Materials Science +17