Concepedia

S. P. Murarka

SP

Statistics

Publications

144

Citations

7.7K

H-Index

48

Active since

1964

Affiliations

Rensselaer Polytechnic Institute(Current)

University at Albany, State University of New York

AT&T (United States)

S. P. Murarka is an author at Rensselaer Polytechnic Institute specializing in materials science, materials engineering, and natural sciences.

Publications per year

1964–2002

144

Publications

144

Refractory silicides for integrated circuits

S. P. Murarka · Journal of Vacuum Science and Technology · 1980 · 601 citations

Engineering, Electrical Engineering, Materials Science +17

Multilevel interconnections for ULSI and GSI era

S. P. Murarka · Materials Science and Engineering R Reports · 1997 · 350 citations

Engineering, Computer Engineering, Electrical Engineering +14

Copper metallization for ULSL and beyond

S. P. Murarka, Steven W. Hymes · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1995 · 260 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Thickness dependent electrical resistivity of ultrathin (<40 nm) Cu films

H.-D Liu, Yiping Zhao, Ganpati Ramanath et al. · Thin Solid Films · 2001 · 252 citations

Natural Sciences, Materials Science, Physics +12

Advanced multilayer metallization schemes with copper as interconnection metal

S. P. Murarka, R.J. Gutmann, Alain E. Kaloyeros et al. · Thin Solid Films · 1993 · 246 citations

Natural Sciences, Materials Engineering, Materials Science +12

1–5 of 144