Alain E. Kaloyeros

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Active since

1986

Affiliations

University at Albany, State University of New York(Current)

Albany State University

MKS Instruments (United States)

University of Illinois Urbana-Champaign

Rensselaer Polytechnic Institute

Alain E. Kaloyeros is an author at University at Albany, State University of New York specializing in materials science, natural sciences, and materials engineering.

ORCID

Publications per year

1986–2024

Publications

Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

Alain E. Kaloyeros, Eric Eisenbraun · Annual Review of Materials Science · 2000 · 362 citations

Natural Sciences, Materials Engineering, Materials Science +17

Advanced multilayer metallization schemes with copper as interconnection metal

S. P. Murarka, R.J. Gutmann, Alain E. Kaloyeros et al. · Thin Solid Films · 1993 · 246 citations

Natural Sciences, Materials Engineering, Materials Science +12

Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications

Alain E. Kaloyeros, F.A. Jove, Jonathan Goff et al. · ECS Journal of Solid State Science and Technology · 2017 · 157 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications

Alain E. Kaloyeros, Youlin Pan, Jonathan Goff et al. · ECS Journal of Solid State Science and Technology · 2020 · 156 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature metal-organic chemical vapor deposition (LTMOCVD) of device-quality copper films for microelectronic applications

Alain E. Kaloyeros, Aiguo Feng, Jonathan Garhart et al. · Journal of Electronic Materials · 1990 · 101 citations

Natural Sciences, Materials Engineering, Materials Science +16

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