The use of titanium-based contact barrier layers in silicon technology

Models for contacts to planar devices

H.H. Berger · Solid-State Electronics · 1972 · 912 citations

Geometric Modeling, Engineering, Design +10

Models for contacts to planar devices

Microelectronics Reliability · 1972 · 818 citations

Geometric Modeling, Engineering, Design +10

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 681 citations

Materials Science, Engineering, Diffusion Resistance +5

Contact Resistance and Contact Resistivity

H.H. Berger · Journal of The Electrochemical Society · 1972 · 496 citations

Materials Science, Semiconductors, Electrical Engineering +14

Redistribution of Acceptor and Donor Impurities during Thermal Oxidation of Silicon

Andrew S. Grove, Otto Leistiko, C. T. Sah · Journal of Applied Physics · 1964 · 332 citations

Materials Science, Electrical Engineering, Chemical Engineering +12