Barrier Materials
Barrier Materials is a class of thin-film materials used in microfabrication to prevent the diffusion of atoms or ions between interconnect layers, distinguished by their high chemical stability and low diffusivity in integrated circuit manufacturing processes.
2.1K
Publications
92.3K
Citations
7.5K
Authors
1.6K
Institutions
Publications per year
2017–2026
449
2.1K
Shoji Ikeda, Jun Hayakawa, Yoshito Ashizawa et al. · Applied Physics Letters · 2008 · 1.5K citations
Natural Sciences, Materials Engineering, Materials Science +16
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Chinese Academy of Sciences
Beijing, China
26 h-index
211 publications
7K citations
University of California, Santa Barbara
Santa Barbara, United States
24 h-index
81 publications
10.2K citations

Tohoku University
Sendai, Japan
22 h-index
124 publications
18.3K citations

Centre National de la Recherche Scientifique
Paris, France
21 h-index
155 publications
4.6K citations

University of Manchester
Manchester, United Kingdom
21 h-index
76 publications
6.9K citations
IBM Research - Thomas J. Watson Research Center
Yorktown Heights, United States
21 h-index
84 publications
9.4K citations
IMEC
Leuven, Belgium
19 h-index
179 publications
3.8K citations
California Institute of Technology
Pasadena, United States
18 h-index
74 publications
6K citations
1–8 of 1.6K
150 publications · 6.3K citations
44
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84 publications · 6K citations
38
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109 publications · 4.5K citations
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79 publications · 3.8K citations
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JES · 67 publications · 2.5K citations
30
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