Concepedia

E. Kolawa

EK

Statistics

Publications

63

Citations

2.5K

H-Index

26

Active since

1984

Affiliations

California Institute of Technology(Current)

Jet Propulsion Laboratory

E. Kolawa is an author at California Institute of Technology specializing in materials science, materials engineering, and thin films.

Publications per year

1984–2010

63

Publications

63

Tantalum-based diffusion barriers in Si/Cu VLSI metallizations

E. Kolawa, Jen‐Sue Chen, J.S. Reid et al. · Journal of Applied Physics · 1991 · 222 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Evaluation of amorphous (Mo, Ta, W)SiN diffusion barriers for 〈Si〉|Cu metallizations

J.S. Reid, E. Kolawa, R. Ruiz et al. · Thin Solid Films · 1993 · 165 citations

Natural Sciences, Materials Engineering, Materials Science +12

Reactively sputtered RuO2 diffusion barriers

E. Kolawa, F. C. T. So, E. T-S. Pan et al. · Applied Physics Letters · 1987 · 121 citations

Engineering, Materials Engineering, Materials Science +17

Full field measurements of curvature using coherent gradient sensing: application to thin film characterization

Ares J. Rosakis, Raman P. Singh, Yoshiko Tsuji et al. · Thin Solid Films · 1998 · 114 citations

Natural Sciences, Materials Engineering, Materials Science +16

Reactively sputtered Ti-Si-N films I. Physical properties

Xin Sun, J.S. Reid, E. Kolawa et al. · Journal of Applied Physics · 1997 · 109 citations

Natural Sciences, Materials Science, Physics +17

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