12
Publications
529
Citations
12
H-Index
1984
Active since
Affiliations
California Institute of Technology(Current)
F. C. T. So is an author at California Institute of Technology specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceThin FilmsMaterials EngineeringSemiconductorsPhysicsMicrostructureCrystalline Defects
Publications per year
1984–1989
12
12
Reactively sputtered RuO2 diffusion barriers
E. Kolawa, F. C. T. So, E. T-S. Pan et al. · Applied Physics Letters · 1987 · 121 citations
Engineering, Thin Film Process Technology, Semiconductors +16
Reactive sputtering of RuO2 films
E. Kolawa, F. C. T. So, W. Flick et al. · Thin Solid Films · 1989 · 62 citations
W<i>x</i>N1−<i>x</i> alloys as diffusion barriers between Al and Si
F. C. T. So, E. Kolawa, X.‐A. Zhao et al. · Journal of Applied Physics · 1988 · 44 citations
Rows per page
1–5 of 12