Statistics
Publications
12
Citations
529
H-Index
12
Active since
1984
Affiliations
California Institute of Technology(Current)
F. C. T. So is an author at California Institute of Technology specializing in materials science, natural sciences, and materials engineering.
Publications per year
1984–1989
12
12
Reactively sputtered RuO2 diffusion barriers
E. Kolawa, F. C. T. So, E. T-S. Pan et al. · Applied Physics Letters · 1987 · 121 citations
Reactive sputtering of RuO2 films
E. Kolawa, F. C. T. So, W. Flick et al. · Thin Solid Films · 1989 · 62 citations
Natural Sciences, Materials Engineering, Materials Science +14
W<i>x</i>N1−<i>x</i> alloys as diffusion barriers between Al and Si
F. C. T. So, E. Kolawa, X.‐A. Zhao et al. · Journal of Applied Physics · 1988 · 44 citations
1–5 of 12