Reactive sputtering of RuO2 films - Concepedia

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Reactive sputtering of RuO2 films

62

Citations

11

References

1989

Year

E. Kolawa, F. C. T. So, W. Flick, X.‐A. Zhao, E. T-S. Pan, M‐A. Nicolet

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsReactive SputteringThin FilmsChemical DepositionThin Film Processing

References

	Year	Citations

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