Reactive sputtering of RuO2 films

Investigation of reactively sputtered TiN films for diffusion barriers

S. Kanamori · Thin Solid Films · 1986 · 181 citations

Natural Sciences, Materials Engineering, Materials Science +14

Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization

L. Krusin‐Elbaum, M. Wittmer, D. S. Yee · Applied Physics Letters · 1987 · 154 citations

Natural Sciences, Materials Engineering, Materials Science +14

Reactively sputtered RuO2 diffusion barriers

E. Kolawa, F. C. T. So, E. T-S. Pan et al. · Applied Physics Letters · 1987 · 121 citations

Engineering, Materials Engineering, Materials Science +17

Ru and RuO2 as Electrical Contact Materials: Preparation and Environmental Interactions

R. G. Vadimsky, R. P. Frankenthal, David E. Thompson · Journal of The Electrochemical Society · 1979 · 82 citations

Natural Sciences, Electrical Engineering, Materials Science +11

Tungsten and other refractory metals for VLSI applications II

E. K. Broadbent · 1987 · 63 citations

Engineering, Materials Engineering, Materials Science +14