115
Publications
5.7K
Citations
39
H-Index
1966
Active since
M‐A. Nicolet is an author at California Institute of Technology specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface SciencePhysicsThin FilmsMaterials EngineeringCrystalline DefectsMicrostructureSemiconductors
Publications per year
1966–1999
115
115
Tantalum-based diffusion barriers in Si/Cu VLSI metallizations
E. Kolawa, Jen‐Sue Chen, J.S. Reid et al. · Journal of Applied Physics · 1991 · 222 citations · Full text
Materials Engineering, Materials Science, Electrical Engineering +15
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1–5 of 115