Concepedia

Reactive Sputtering

Reactive Sputtering is a thin-film deposition technique within physical vapor deposition wherein a target material is sputtered in the presence of a reactive gas that chemically interacts with the sputtered species to form a compound film on the substrate.

2.4K

Publications

101.3K

Citations

7.2K

Authors

1.4K

Institutions

Publications per year

2017–2026

297

Parents

Publications

2.4K

Reproducible resistance switching in polycrystalline NiO films

Sunae Seo, Myoung‐Jae Lee, David H. Seo et al. · Applied Physics Letters · 2004 · 934 citations

, , +16

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

, , +14

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 699 citations

, , +10

Optical band gap of indium nitride

T.L. Tansley, C. P. Foley · Journal of Applied Physics · 1986 · 606 citations

, , +17

Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering

Ta-Kun Chen, Tao-Tsung Shun, Jien‐Wei Yeh et al. · Surface and Coatings Technology · 2004 · 575 citations

, , +11

1–5 of 2.4K

Authors

7.2K

  1. DD
    Diederik Depla

    Ghent University, Belgium

    37 publications · 1.7K citations

    25

    h-index

  2. SB
    S. Berg

    Uppsala University, Sweden

    28 publications · 1.4K citations

    20

    h-index

  3. LH
    Lars Hultman

    Linköping University, Sweden

    30 publications · 1.8K citations

    20

    h-index

  4. TN
    Tomas Nyberg

    Uppsala University, Sweden

    25 publications · 1.5K citations

    19

    h-index

  5. JM
    J. Musil

    University of West Bohemia in Pilsen, Czechia

    19 publications · 1.7K citations

    17

    h-index

1–5 of 7.2K

Institutions

1.4K

  1. Linköping University

    Linköping, Sweden

    36 h-index

    270 publications

    15.7K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    35 h-index

    450 publications

    15.5K citations

  3. Uppsala University

    Uppsala, Sweden

    33 h-index

    211 publications

    11.7K citations

  4. Chinese Academy of Sciences

    Beijing, China

    28 h-index

    169 publications

    9.1K citations

  5. Ghent University

    Ghent, Belgium

    25 h-index

    107 publications

    5K citations

  6. Thinfilm (Sweden)

    Linköping, Sweden

    24 h-index

    146 publications

    7.6K citations

  7. University of West Bohemia in Pilsen

    Pilsen, Czechia

    23 h-index

    97 publications

    6K citations

  8. École Polytechnique Fédérale de Lausanne

    Lausanne, Switzerland

    22 h-index

    86 publications

    4.9K citations

1–8 of 1.4K

Venues

  1. Thin Solid Films

    300 publications · 15.4K citations

    61

    h-index

  2. Journal of Applied Physics

    230 publications · 13K citations

    60

    h-index

  3. Surface and Coatings Technology

    205 publications · 9.5K citations

    54

    h-index

  4. Applied Physics Letters

    133 publications · 8.4K citations

    53

    h-index

  5. 47

    h-index

1–5