Concepedia

S. Berg

SB

22

Publications

1.6K

Citations

17

H-Index

1986

Active since

Affiliations

Uppsala University(Current)

Czech Technical University in Prague

S. Berg is an author at Uppsala University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceThin FilmsMaterials EngineeringModeling And SimulationProcess ControlSystems EngineeringNumerical Simulation

Publications per year

1986–2014

22

Publications

22

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 689 citations

Engineering, Industrial Engineering, Process Simulation Model +8

Process modeling of reactive sputtering

S. Berg, Hans‐Olof Blom, Mona Moradi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 102 citations

Electrical Engineering, Engineering, Industrial Engineering +12

Upgrading the “Berg-model” for reactive sputtering processes

S. Berg, Erik Särhammar, Tomas Nyberg · Thin Solid Films · 2014 · 90 citations

Engineering, Model Synthesis, Reactive Sputtering Processes +3

Dynamic behaviour of the reactive sputtering process

Tomáš Kubart, Oliver Kappertz, Tomas Nyberg et al. · Thin Solid Films · 2006 · 80 citations

Engineering, Reactive Sputtering Process, Numerical Simulation +6

The use of nitrogen flow as a deposition rate control in reactive sputtering

S. Berg, T. Larsson, Hans‐Olof Blom · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 70 citations

Engineering, Vacuum Device, Chemical Deposition +16

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