Concepedia

Hans‐Olof Blom

HB

34

Publications

1.8K

Citations

23

H-Index

1984

Active since

Affiliations

Uppsala University(Current)

University of California, Los Angeles

KTH Royal Institute of Technology

Stanford Synchrotron Radiation Lightsource

SLAC National Accelerator Laboratory

Hans‐Olof Blom is an author at Uppsala University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMaterials EngineeringThin FilmsMicroelectronicsMicrofabricationElectrical EngineeringChemical Engineering

Publications per year

1984–2009

34

Publications

34

Modeling of reactive sputtering of compound materials

S. Berg, Hans‐Olof Blom, T. Larsson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 373 citations

Materials Engineering, Materials Science, Gas Injection +8

Predicting thin-film stoichiometry in reactive sputtering

S. Berg, T. Larsson, C. Nender et al. · Journal of Applied Physics · 1988 · 173 citations

Materials Science, Materials Engineering, Compound Film +9

Microloading effect in reactive ion etching

Christer Hedlund, Hans‐Olof Blom, S. Berg · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 119 citations

Materials Science, Large Area, Electrical Engineering +15

Process modeling of reactive sputtering

S. Berg, Hans‐Olof Blom, Mona Moradi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 102 citations

Electrical Engineering, Engineering, Industrial Engineering +12

A physical model for eliminating instabilities in reactive sputtering

T. Larsson, Hans‐Olof Blom, C. Nender et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 91 citations

Engineering, Target Fabrication, Vacuum Device +22

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