S. Berg

Modeling of reactive sputtering of compound materials

S. Berg, Hans‐Olof Blom, T. Larsson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 373 citations

Natural Sciences, Materials Engineering, Materials Science +13

Predicting thin-film stoichiometry in reactive sputtering

S. Berg, T. Larsson, C. Nender et al. · Journal of Applied Physics · 1988 · 173 citations

Natural Sciences, Materials Engineering, Materials Science +14

T-DYN Monte Carlo simulations applied to ion assisted thin film processes

J.P. Biersack, S. Berg, C. Nender · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 164 citations

Natural Sciences, Materials Science, Physics +14

Microloading effect in reactive ion etching

Christer Hedlund, Hans‐Olof Blom, S. Berg · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 124 citations

Engineering, Materials Engineering, Materials Science +13

Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

F. Engelmark, G. Fucntes, Ilia Katardjiev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +17