F. Engelmark

Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature

G.F. Iriarte, F. Engelmark, Ilia Katardjiev · Journal of materials research/Pratt's guide to venture capital sources · 2002 · 97 citations

Materials Science, Materials Engineering, Room Temperature +11

Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

F. Engelmark, G. Fucntes, Ilia Katardjiev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 92 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +16

Structural and electroacoustic studies of AlN thin films during low temperature radio frequency sputter deposition

F. Engelmark, G.F. Iriarte, Ilia Katardjiev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 68 citations · Full text

Aln Film, Aluminium Nitride, Thin Film Physics +19

Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni

G.F. Iriarte, Johan Bjurström, Jörgen Westlinder et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 66 citations

Materials Science, Materials Engineering, Aluminium Nitride +14

Electrical characterization of aln mis and mim structures

F. Engelmark, Jörgen Westlinder, G.F. Iriarte et al. · IEEE Transactions on Electron Devices · 2003 · 62 citations

Aluminium Nitride, Engineering, Aluminum Nitride +17