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Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature

Materials ScienceMaterials EngineeringRoom TemperatureAluminium NitrideEngineeringPhysicsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsReactive Sputter DepositionChemical DepositionChemical Vapor DepositionThin Film Processing