Tomas Nyberg

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 689 citations

Engineering, Industrial Engineering, Process Simulation Model +8

Deposition of Ti2AlC and Ti3AlC2 epitaxial films by magnetron sputtering

O. Wilhelmsson, J.-P. Palmquist, Tomas Nyberg et al. · Applied Physics Letters · 2004 · 125 citations

Materials Science, Magnetic Properties, Material Analysis +11

Upgrading the “Berg-model” for reactive sputtering processes

S. Berg, Erik Särhammar, Tomas Nyberg · Thin Solid Films · 2014 · 90 citations

Engineering, Model Synthesis, Reactive Sputtering Processes +3

Dynamic behaviour of the reactive sputtering process

Tomáš Kubart, Oliver Kappertz, Tomas Nyberg et al. · Thin Solid Films · 2006 · 80 citations

Engineering, Reactive Sputtering Process, Numerical Simulation +6

Defect formation in graphene during low-energy ion bombardment

Patrik Ahlberg, Fredrik O. L. Johansson, Zhibin Zhang et al. · APL Materials · 2016 · 78 citations · Full text

Materials Science, Graphene Nanomeshes, Graphene-based Nano-antennas +10