Thin Solid Films · 1991 · 744 citations · 34 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsCoatingsSurface CoatingsThin Film AdhesionThin-film DepositionThin-film MaterialsThin-film PatterningIndium Tin Oxide Thin FilmsReactive SputteringSputter DepositionSputteringSurface Coatings On Glass
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John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations
Natural Sciences, Materials Engineering, Materials Science +12
Structure and properties of TiN coatings
J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations
Natural Sciences, Materials Engineering, Materials Science +12