Concepedia

Sputter Deposition

Sputter Deposition is a thin-film deposition technique in which atoms are dislodged from a solid target material by energetic ion bombardment and subsequently deposited as a thin film onto a substrate, distinguishing it from other deposition methods by its reliance on physical sputtering rather than chemical reaction or thermal evaporation.

5.9K

Publications

235.5K

Citations

17K

Authors

2.5K

Institutions

Publications per year

2017–2026

712

Parents

Publications

5.9K

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

, , +16

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

, , +7

Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride

Jan Kischkat, Sven Peters, Bernd Gruska et al. · Applied Optics · 2012 · 992 citations

, , +17

Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

, , +17

High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer

Hai Q. Chiang, John F. Wager, Randy Hoffman et al. · Applied Physics Letters · 2004 · 786 citations

, , +17

1–5 of 5.9K

Authors

17K

  1. LH
    Lars Hultman

    Linköping University, Sweden

    52 publications · 4.1K citations

    34

    h-index

  2. IP
    I. Petrov

    University of Illinois Urbana-Champaign, United States

    53 publications · 5.6K citations

    31

    h-index

  3. JM
    J. Musil

    University of West Bohemia in Pilsen, Czechia

    37 publications · 2.3K citations

    25

    h-index

  4. DD
    Diederik Depla

    Ghent University, Belgium

    41 publications · 2.3K citations

    24

    h-index

  5. JV
    J. Vlček

    University of West Bohemia in Pilsen, Czechia

    27 publications · 1.7K citations

    22

    h-index

1–5 of 17K

Institutions

2.5K

  1. Linköping University

    Linköping, Sweden

    52 h-index

    414 publications

    34.9K citations

  2. University of Illinois Urbana-Champaign

    Urbana, United States

    48 h-index

    350 publications

    27.7K citations

  3. Thinfilm (Sweden)

    Linköping, Sweden

    40 h-index

    242 publications

    17.7K citations

  4. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    40 h-index

    210 publications

    12.5K citations

  5. Centre National de la Recherche Scientifique

    Paris, France

    39 h-index

    633 publications

    20.4K citations

  6. IBM (United States)

    Armonk, United States

    38 h-index

    186 publications

    11.5K citations

  7. Uppsala University

    Uppsala, Sweden

    37 h-index

    277 publications

    12.9K citations

  8. University of West Bohemia in Pilsen

    Pilsen, Czechia

    29 h-index

    121 publications

    6.7K citations

1–8 of 2.5K

Venues

  1. Thin Solid Films

    695 publications · 29.2K citations

    82

    h-index

  2. Journal of Applied Physics

    427 publications · 21.1K citations

    74

    h-index

  3. 67

    h-index

  4. Applied Physics Letters

    265 publications · 14.4K citations

    63

    h-index

  5. Surface and Coatings Technology

    462 publications · 18.2K citations

    62

    h-index

1–5