Concepedia

E. K. Broadbent

EK

20

Publications

898

Citations

16

H-Index

1984

Active since

Affiliations

Micro Focus (United States)(Current)

Philips (United States)

IPS Research (United States)

Philips (Finland)

E. K. Broadbent is an author at Micro Focus (United States) specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

1984–2003

20

Publications

20

Selective Low Pressure Chemical Vapor Deposition of Tungsten

E. K. Broadbent, Chuck Ramiller · Journal of The Electrochemical Society · 1984 · 220 citations

, , +12

Interactions of thin Ti films with Si, SiO2, Si3N4, and SiO<i>x</i>N<i>y</i> under rapid thermal annealing

A. E. Morgan, E. K. Broadbent, K. N. Ritz et al. · Journal of Applied Physics · 1988 · 123 citations

, , +11

Characterization of a Self‐Aligned Cobalt Silicide Process

A. E. Morgan, E. K. Broadbent, M. Delfino et al. · Journal of The Electrochemical Society · 1987 · 100 citations

, , +16

Tungsten and other refractory metals for VLSI applications II

E. K. Broadbent · 1987 · 63 citations

, , +4

Interfacial Structure of Tungsten Layers Formed by Selective Low Pressure Chemical Vapor Deposition

W. T. Stacy, E. K. Broadbent, M. Norcott · Journal of The Electrochemical Society · 1985 · 58 citations

, , +12

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