Concepedia

R. Ruiz

RR

16

Publications

607

Citations

13

H-Index

1991

Active since

Affiliations

Jet Propulsion Laboratory(Current)

California Institute of Technology

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire d'Électronique des Technologies de l'Information

Direction de la Recherche Technologique

R. Ruiz is an author at Jet Propulsion Laboratory specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMaterials EngineeringThin FilmsMicrostructureSemiconductorsElectrical EngineeringMicroelectronics

Publications per year

1991–2006

16

Publications

16

Evaluation of amorphous (Mo, Ta, W)SiN diffusion barriers for 〈Si〉|Cu metallizations

J.S. Reid, E. Kolawa, R. Ruiz et al. · Thin Solid Films · 1993 · 164 citations

Amorphous (Mo, Ta, or W)–Si–N diffusion barriers for Al metallizations

J.S. Reid, E. Kolawa, C. M. Garland et al. · Journal of Applied Physics · 1996 · 71 citations

Aluminium Nitride, Engineering, Secondary-ion-mass Spectrometry +17

Sputtered Ta-Si-N diffusion barriers in Cu metallizations for Si

E. Kolawa, P.J. Pokela, J.S. Reid et al. · IEEE Electron Device Letters · 1991 · 70 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Reactively sputtered Ti-Si-N films. II. Diffusion barriers for Al and Cu metallizations on Si

Xin Sun, J.S. Reid, E. Kolawa et al. · Journal of Applied Physics · 1997 · 64 citations

Ti-si-n Barriers, Engineering, Thin Film Process Technology +16

W-B-N diffusion barriers for Si/Cu metallizations

J.S. Reid, R.Y. Liu, Paul Martin Smith et al. · Thin Solid Films · 1995 · 42 citations

Materials Science, W-b-n Diffusion Barriers, Materials Engineering +6

Rows per page

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