Statistics
Publications
15
Citations
599
H-Index
13
Active since
1991
R. Ruiz is an author at Jet Propulsion Laboratory specializing in materials engineering, materials science, and semiconductor device materials.
Publications per year
1991–2006
15
15
Evaluation of amorphous (Mo, Ta, W)SiN diffusion barriers for 〈Si〉|Cu metallizations
J.S. Reid, E. Kolawa, R. Ruiz et al. · Thin Solid Films · 1993 · 165 citations
Natural Sciences, Materials Engineering, Materials Science +12
Amorphous (Mo, Ta, or W)–Si–N diffusion barriers for Al metallizations
J.S. Reid, E. Kolawa, C. M. Garland et al. · Journal of Applied Physics · 1996 · 71 citations
Sputtered Ta-Si-N diffusion barriers in Cu metallizations for Si
E. Kolawa, P.J. Pokela, J.S. Reid et al. · IEEE Electron Device Letters · 1991 · 70 citations
W-B-N diffusion barriers for Si/Cu metallizations
J.S. Reid, R.Y. Liu, Paul Martin Smith et al. · Thin Solid Films · 1995 · 43 citations
Natural Sciences, Materials Engineering, Materials Science +11
1–5 of 15