W-B-N diffusion barriers for Si/Cu metallizations - Concepedia

Concepedia

Publication | Closed Access

W-B-N diffusion barriers for Si/Cu metallizations

42

Citations

20

References

1995

Year

J.S. Reid, R.Y. Liu, Paul Martin Smith, R. Ruiz, M.−A. Nicolet

Thin Solid Films

Materials ScienceW-b-n Diffusion BarriersMaterials EngineeringEngineeringDiffusion ResistanceApplied PhysicsMetallurgical InteractionSemiconductor MaterialMicrostructure

References

	Year	Citations

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