Paul Martin Smith - Concepedia

Author

Paul Martin Smith

Sandia National Laboratories

Also Known As

P. Smith, P.M Smith, P.M. Smith, P.M.R. Smith, PAUL M. SMITH, Paul M. Smith, Paul Martin Smith, Paul Smith

Publications

282

Citations

H-Index

Concepts

All Affiliations

Sandia National Laboratories California Institute of Technology

About

Paul Martin Smith is an author at Sandia National Laboratories specializing in engineering, materials science, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	7	7	235
2	Applied Physics	4	4	142
3	Chemical Engineering	3	3	128
4	Chemistry	2	2	42
5	Medicine	1	1	12

Paul Martin Smith

Publications

258

Citations

H-Index

Page 1

	Year	Citations
Chemical additives for improved copper chemical vapour deposition processing John A. T. Norman, David A. Roberts, Arthur K. Hochberg, Thin Solid Films Materials ScienceChemical EngineeringCopper Oxide MaterialsEngineeringDirected Energy Deposition	1995	51
Chemical vapor deposition of titanium–silicon–nitride films Paul Martin Smith, Jonathan S. Custer Applied Physics Letters Materials ScienceChemical EngineeringEngineeringElectronic MaterialsSurface Science	1997	47
W-B-N diffusion barriers for Si/Cu metallizations J.S. Reid, R.Y. Liu, Paul Martin Smith, Thin Solid Films Materials ScienceW-b-n Diffusion BarriersMaterials EngineeringEngineeringDiffusion Resistance	1995	42
Enhanced Chemical Vapor Deposition of Copper from ( hfac ) Cu ( TMVS ) Using Liquid Coinjection of TMVS Gary A. Petersen, J. E. Parmeter, C. Apblett, Journal of The Electrochemical Society Materials ScienceChemical EngineeringEngineeringNanomanufacturingHigh Purity	1995	30
Growth and properties of W–Si–N diffusion barriers deposited by chemical vapor deposition J. G. Fleming, E. Roherty‐Osmun, Paul Martin Smith, Thin Solid Films Materials ScienceEngineeringSurface ScienceApplied PhysicsW–si–n Diffusion Barriers	1998	27
Demonstration of laser-assisted epitaxial deposition of Ge<i>x</i>Si1−<i>x</i> alloys on single-crystal Si S. Lombardo, Paul Martin Smith, Michael J. Uttormark, Applied Physics Letters Materials ScienceMaterials EngineeringElectron Beam DepositionEngineeringCrystalline Defects	1991	26
Innovative wick design for multi-source, flat plate heat pipes Michael J. Rightley, C.P. Tigges, Richard C. Givler, Microelectronics Journal	2003	23
The use of fluorescence microscopy in the characterisation of amorphous organic matter Paul Martin Smith Organic Geochemistry Amorphous Organic MatterFluorescence MicroscopyEngineeringMicroscopyMicroscopy Method	1984	12

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