Concepedia

Publication | Closed Access

Chemical additives for improved copper chemical vapour deposition processing

DOI

51

Citations

6

References

1995

Year

John A. T. Norman, David A. Roberts, Arthur K. Hochberg, Paul Martin Smith, Gary A. Petersen, J. E. Parmeter, C. Apblett, Thomas R. Omstead
Thin Solid Films

References

YearCitations

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