Statistics
Publications
8
Citations
477
H-Index
8
Active since
1990
Affiliations
P.J. Pokela is an author at California Institute of Technology specializing in materials science, materials engineering, and natural sciences.
Publications per year
1990–1991
8
8
Tantalum-based diffusion barriers in Si/Cu VLSI metallizations
E. Kolawa, Jen‐Sue Chen, J.S. Reid et al. · Journal of Applied Physics · 1991 · 222 citations · Full text
Sputtered Ta-Si-N diffusion barriers in Cu metallizations for Si
E. Kolawa, P.J. Pokela, J.S. Reid et al. · IEEE Electron Device Letters · 1991 · 70 citations
Performance of W100−xNx diffusion barriers between 〈Si〉 and Cu
P.J. Pokela, Chee‐Kin Kwok, E. Kolawa et al. · Applied Surface Science · 1991 · 67 citations
Natural Sciences, Materials Engineering, Materials Science +8
Amorphous Ta-Si-N diffusion barriers in Si/Al and Si/Cu metallizations
E. Kolawa, P.J. Pokela, J.S. Reid et al. · Applied Surface Science · 1991 · 43 citations
Natural Sciences, Materials Engineering, Materials Science +14
Thermal oxidation of reactively sputtered amorphous W80N20 films
Quat T. Vu, P.J. Pokela, C. L. Garden et al. · Journal of Applied Physics · 1990 · 22 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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