Amorphous Ta-Si-N diffusion barriers in Si/Al and Si/Cu metallizations - Concepedia

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Amorphous Ta-Si-N diffusion barriers in Si/Al and Si/Cu metallizations

42

Citations

7

References

1991

Year

E. Kolawa, P.J. Pokela, J.S. Reid, Jen‐Sue Chen, M.−A. Nicolet

Applied Surface Science

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsSi/cu MetallizationsSemiconductor Device FabricationAmorphous SolidSilicon On Insulator

References

	Year	Citations

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