Concepedia

Performance of W100−xNx diffusion barriers between 〈Si〉 and Cu

P.J. Pokela, Chee‐Kin Kwok, E. Kolawa, Sirli Raud, M.−A. Nicolet

Applied Surface Science · 1991 · 67 citations · 8 references

DOI

Concepts

References

8

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

, , +10

Sputtered W–N diffusion barriers

H. Kattelus, E. Kolawa, K. Affolter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 101 citations

, , +17

WNx: Properties and applications

Frank C. T. So, Elzbieta Kolawa, Xin-An Zhao et al. · Thin Solid Films · 1987 · 47 citations

, , +2

W<i>x</i>N1−<i>x</i> alloys as diffusion barriers between Al and Si

F. C. T. So, E. Kolawa, X.‐A. Zhao et al. · Journal of Applied Physics · 1988 · 44 citations

, , +16

A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers

A. Charaı̈, Sven Erik Hörnström, P. M. Fryer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 36 citations

, , +17