Concepedia

H. Kattelus

HK

30

Publications

1.2K

Citations

20

H-Index

1985

Active since

Affiliations

VTT Technical Research Centre of Finland(Current)

California Institute of Technology

National metrology institute VTT MIKES

University of Helsinki

Helsinki Institute of Physics

H. Kattelus is an author at VTT Technical Research Centre of Finland specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringElectrical EngineeringMechanical EngineeringSurface ScienceThin Films

Publications per year

1985–2015

30

Publications

30

A 12 MHz micromechanical bulk acoustic mode oscillator

T. Mattila, Jyrki Kiihamäki, T. Lamminmäki et al. · Sensors and Actuators A Physical · 2002 · 146 citations

Engineering, Mechanical Engineering, Mechanical Systems +5

Sputtered W–N diffusion barriers

H. Kattelus, E. Kolawa, K. Affolter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 99 citations

Engineering, Thin Film Process Technology, Metal Overlayer +17

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus et al. · Sensors and Actuators A Physical · 2007 · 87 citations

Geometric Modeling, Robot Kinematics, Engineering +10

Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes

Lassi Hiltunen, H. Kattelus, Markku Leskelä et al. · Materials Chemistry and Physics · 1991 · 85 citations

Materials Engineering, Materials Science, Engineering +8

Implementing ALD Layers in MEMS Processing

Riikka L. Puurunen, Jaakko Saarilahti, H. Kattelus · ECS Transactions · 2007 · 75 citations

Engineering, Mechanical Engineering, Computer Architecture +18

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