Concepedia

Jaakko Saarilahti

JS

Statistics

Publications

15

Citations

827

H-Index

12

Active since

1985

Affiliations

VTT Technical Research Centre of Finland(Current)

Helsinki Institute of Physics

University of Helsinki

Jaakko Saarilahti is an author at VTT Technical Research Centre of Finland specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicroelectronicsMechanical EngineeringThin FilmsMicrofabricationMaterials EngineeringRobotics

Publications per year

1985–2022

15

Publications

15

Interactive personal-computer data analysis of ion backscattering spectra

Jaakko Saarilahti, E. Raühala · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 268 citations

Data Science, Spectroscopy, Mass Spectrometry +4

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Outi Rusanen, Jaakko Saarilahti et al. · Sensors and Actuators A Physical · 2000 · 97 citations

Micromachined Ultrasonic Transducer, Flexible Electronics, Low-stress Polysilicon Membrane

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus et al. · Sensors and Actuators A Physical · 2007 · 87 citations

Geometric Modeling, Robot Kinematics, Engineering +10

Implementing ALD Layers in MEMS Processing

Riikka L. Puurunen, Jaakko Saarilahti, H. Kattelus · ECS Transactions · 2007 · 75 citations

Engineering, Mechanical Engineering, Computer Architecture +18

Performance of titanium nitride diffusion barriers in aluminum–titanium metallization schemes for integrated circuits

I. Suni, M. Blomberg, Jaakko Saarilahti · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 60 citations

Aluminium Nitride, Engineering, Integrated Circuits +17

1–5 of 15