Concepedia

Altti Torkkeli

AT

Statistics

Publications

10

Citations

406

H-Index

10

Active since

1997

Affiliations

VTT Technical Research Centre of Finland(Current)

Murata (Finland)

Aalto University

Nokia (Finland)

Altti Torkkeli is an author at VTT Technical Research Centre of Finland specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMicrofabricationMaterial ScienceMicroelectronicsApplied PhysicsElectronic PackagingElectrical EngineeringMechanical EngineeringInstrumentationSurface Science

Publications per year

1997–2019

10

Publications

10

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Outi Rusanen, Jaakko Saarilahti et al. · Sensors and Actuators A Physical · 2000 · 97 citations

Micromachined Ultrasonic Transducer, Flexible Electronics, Low-stress Polysilicon Membrane

Mechanical properties and reliability of aluminum nitride thin films

Elmeri Österlund, Jere Kinnunen, Ville Rontu et al. · Journal of Alloys and Compounds · 2018 · 57 citations · Full text

Materials Science, Aluminium Nitride, Engineering +4

Electrostatic transportation of water droplets on superhydrophobic surfaces

Altti Torkkeli, Jaakko Saarilahti, Ari Häärä et al. · 2002 · 51 citations

Materials Science, Self-cleaning Surface, Chemical Engineering +13

Droplet microfluidics on a planar surface

Altti Torkkeli · 2003 · 50 citations · Full text

Electrically tuneable micromachined fabry-perot interferometer in gas analysis

Margareta R. A. Blomberg, Altti Torkkeli, A. Lehto et al. · Physica Scripta · 1997 · 44 citations

Photonic Sensor, Gas Analysis, Engineering +16

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